
Silicon Carbide MOSFETs Challenge IGBTs | Power …
In light of recent silicon carbide (SiC) technology advances, commercial production of 1200-V 4H-SiC [1] power MOSFETs is now feasible. There have been improvements in 4H-SiC substrate quality and epitaxy, optimized device designs and fabriion processes, plus increased channel mobility with nitridation annealing. [2]