
SUPPLEMENTARY MATERIALS for Novel method for …
SUPPLEMENTARY MATERIALS Novel Method for Electroless Etching of 6H–SiC Gyula Károlyházy 1,*, Dávid Beke 1, Dóra Zalka 1, Sándor Lenk 2, Olga Krafcsik 2, Katalin Kamarás 1 and Ádám Gali 1,2,* 1 Institute for Solid State Physics and Optics, Wigner Research Centre for …